Precious Metal Business contents
Sputtering targets
High-purity sputtering targets for optimal thin-film formation
- We use high-purity base metals derived from precious metal refining technologies that we've accumulated over many years of operations.
- We can manufacture both single-metal and alloy-composition products.
- Use our targets to fine-tune grain formation to achieve uniform thin-film formation.
- We can propose custom targets (MEX-TG™) to extend service life and reduce precious metal use.
- We can also accommodate batch orders for non-precious-metal targets made from substances such as nickel and titanium, which are ideal for use in film formation processes for laminated electrodes on the bottom surface of discrete semiconductors such as power semiconductors.
- Our targets for use in excitation electrode film formation in timing devices have earned customers’ trust.
- We also manufacture cylindrical targets for special applications.
Product Information
Precious metal targets
| 金属 | 純度 | 合金組成 |
|---|---|---|
| Au | 4N 5N | AuAg AuSn |
| Ag | 4N | Reflective films, transparent electrodes |
| Pt | 3N5 | - |
| Pd | 3N5 | - |
| Ru | 3N5 | - |
Non-precious-metal targets
| 金属 | 純度 | 合金組成 |
|---|---|---|
| Ni | 3N 4N | NiV |
| Ti | 3N 4N | - |
| Cr | 4N | - |
- We also offer bonding processing service for customer-supplied targets.
- We also offer backing plate processing service.
- We can also recover material from used targets (precious metal and non-precious-metal) from other manufacturers.
Inside chamber life cycle management
In the area of precious metal film formation, recovering material deposits inside equipment is the first step towards lowering costs. For this service, sales engineers with specialized precious metal skills provide comprehensive management of the precious metal life cycle inside vacuum thin-film formation systems.
Precision cleaning of parts inside equipment
We recover precious metals that have built up on parts, restore the parts by cleaning them to a high level of purity, and reuse the recovered precious metals as raw materials for targets.
Recovery and refining of used targets
We recover old parts whose sputtering service life has been exceeded and reuse refined precious metals as raw materials for targets.
- We manage the precious metals recycled from precision cleaning and used targets in customers’ accounts to realize efficient use.
- We can propose a variety of base metal use arrangements to lower both initial and running costs associated with target use.
Providing three types of vacuum film formation system value
in a single package
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