We provide three types of vacuum film formation system
value in a single package.
Comprehensive range of capabilities that extends from sales of vacuum film formation materials, which is our primary service, to related businesses.
We take a cyclical, problem-solving approach to precious metal life cycle management with the goal of realizing efficient use of precious metal resources.
As one of the first companies in the industry to commercialize cleaning of vacuum film formation system parts in order to recover precious metals, we set the standard for precision cleaning.
Drawing on more than 70 years of experience in precious metal recovery, refining, and recycling, we offer packaged solutions that can be customized to satisfy customers’ needs. Our specialized engineering service team can propose solutions that align with customer requirements. Specialized engineering teams at our plant continuously search for the best possible recovery, refining, and cleaning methods.
Inside chamber life cycle management makes it possible to recover, refine, and recycle precious metals from byproducts generated by the following thin-film deposition processes.
We’ve led the industry by fielding proprietary deposit separation and cleaning technologies derived from our precious metal refining technology. By extending the service life of shield kits and other parts inside vacuum chambers, this business has pioneered new ways to improve production performance and ensure effective use of precious metal resources. We’re proud to provide this service as a comprehensive inside chamber life cycle solution.
Advanced cleaning technology and service, offered through two plants in Japan and three plants elsewhere in Asia.
We satisfy customers’ vacuum system internal part recycling and cleaning requirements with innovative cleaning technology and precious metal smelting technology, an area in which we have an extensive track record.
We satisfy customers’ internal chamber part recycling requirements with innovative cleaning technology.
Cleaning for reuse (removal of deposits in sputter equipment and vapor deposition equipment)
We have an extensive track record of cleaning for reuse in partnership with a variety of device manufacturers, particularly for metal films.
*We can propose optimal process conditions in order to limit film peeling and particle shedding by effectively combining anchoring and cushioning effects.
Thermal spraying evaluation options include roughness measurement using a surface tester, surface and cross-sectional coating observation using a macro lens or SEM, and adhesion evaluation using a tensile tester.